ABSTRACT
Ultrasonic micromachining (USM) is a non-traditional machining process utilized extensively in microfabrication and microengineering applications. This chapter provides a comprehensive overview of USM, covering its principles, equipment, process parameters, applications, advantages, and limitations. The discussion also includes recent advancements and emerging trends in the field of USM. By understanding the intricacies of USM, researchers and practitioners can harness its potential for precise and efficient microscale material removal.
KEYWORDS: Ultrasonic micromachining, Microfabrication, Microengineering, Non-traditional machining, Micro-scale material removal
2025 – Advanced Machining and Micromachining Processes